Patent · US Active

Pressure sensors and method for forming a MEMS pressure sensor

US10996125B2 · kind B2 · utility

1Cited by

1References

33Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Markus Eckinger · Regenstauf, DE
Dirk Hammerschmidt · Villach, AT
Florian BRANDL · Maxhütte-Haidhof, DE
Bernhard Winkler · Birkenfeld, DE

Key dates

Filing date	May 10, 2018
Grant date	May 4, 2021
Priority date	—
Expiry date	Dec 28, 2038

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81C2203/032
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

A pressure sensor is provided. The pressure sensor includes at least two electrodes and an integrated circuit configured to sense a capacitance between the at least two electrodes. Further, the pressure sensor includes a Microelectromechanical System (MEMS) structure including a conductive or dielectric membrane configured to move, depending on the pressure, relative to the at least two electrodes.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.