Patent · US Active

Photoacoustic measurement systems and methods using the photoacoustic effect to measure emission intensities, gas concentrations, and distances

US10996201B2 · kind B2 · utility

1Cited by

5References

21Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Matthias Eberl · Schweinhub, DE
Franz Jost · Stuttgart, DE

Key dates

Filing date	Dec 20, 2018
Grant date	May 4, 2021
Priority date	—
Expiry date	Aug 29, 2039

Classification

Technology area (CPC G)Physics
CPC primaryG01N2291/021
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An apparatus containing an optical emitter configured to emit optical radiation is provided. Further, the apparatus includes a first hermetically sealed measurement cell filled with a first gas. The first gas is configured to absorb the optical radiation at least partially at one or more predetermined wavelengths. Additionally, the apparatus includes a first microphone arranged in the measurement cell and configured to generate a first microphone signal on a basis of a photoacoustic excitation of the first gas by the optical radiation. The apparatus moreover includes an evaluation circuit configured to take the first microphone signal as a basis for generating a first measurement signal indicating an emission intensity of the optical emitter at the one or more predetermined wavelengths.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.