Inspection device, inspection method, and storage medium
US10997713B2 · kind B2 · utility
2Cited by
4References
17Claims
0Family size
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Key dates
| Filing date | Feb 28, 2019 |
| Grant date | May 4, 2021 |
| Priority date | — |
| Expiry date | Aug 17, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
According to one embodiment, an inspection device includes: an image generation device configured to generate a second image corresponding to a first image; and a defect detection device configured to estimate a nonlinear shift based on a plurality of partial region sets, each of the partial region sets including a first partial region in the first image and a second partial region in the second image corresponding to the first partial region, and detect a defect in the second image from the first image.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.