Offset pads over TSV
US10998292B2 · kind B2 · utility
132Cited by
59References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 13, 2019 |
| Grant date | May 4, 2021 |
| Priority date | — |
| Expiry date | Jun 13, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2225/06544
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Representative techniques and devices including process steps may be employed to mitigate the potential for delamination of bonded microelectronic substrates due to metal expansion at a bonding interface. For example, a metal pad may be disposed at a bonding surface of at least one of the microelectronic substrates, where the contact pad is positioned offset relative to a TSV in the substrate and electrically coupled to the TSV.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.