Defect inspection method and defect inspection device
US11002687B2 · kind B2 · utility
1Cited by
10References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 16, 2016 |
| Grant date | May 11, 2021 |
| Priority date | — |
| Expiry date | Jan 7, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2817
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A defect inspection device includes a sample support member, a negative voltage, an imaging element, an ultraviolet light source, a movement stage, and a control device. The control device controls the movement stage such that a portion of a linear part included in the image or a location on an extensional line of the linear part is positioned at a specific location in an irradiated region of the electron beam. The control device also repeats the control of the movement stage until an end of the linear part is positioned within the irradiated region of the electron beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.