CMOS-compatible dew point sensor device and method of determining a dew point
US11002696B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 21, 2017 |
| Grant date | May 11, 2021 |
| Priority date | — |
| Expiry date | Sep 24, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N25/68
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In an embodiment a dew point sensor device includes a semiconductor substrate, a top layer arranged on the semiconductor substrate, a Peltier element integrated in the semiconductor substrate, a temperature sensor, a capacitor arranged at a surface of the top layer facing away from the semiconductor substrate, the temperature sensor and the capacitor being arranged so that a temperature of the capacitor is measurable by the temperature sensor, wherein the capacitor includes a plurality of capacitor elements each having a capacitance, and an electronic circuit configured for an individual determination of the capacitances and a generation of a set of binary digits, each of the binary digits corresponding to one of the capacitor elements and indicating whether the capacitance of the capacitor element is within a predefined range.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.