Method and apparatus of operating a scanning probe microscope
US11002757B2 · kind B2 · utility
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24References
14Claims
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Key dates
| Filing date | Dec 10, 2019 |
| Grant date | May 11, 2021 |
| Priority date | — |
| Expiry date | Dec 10, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q60/34
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode workable across varying environments, including gaseous, fluidic and vacuum.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.