Controlled delivery of process gas using a remote pressure measurement device
US11003198B2 · kind B2 · utility
3Cited by
187References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 15, 2015 |
| Grant date | May 11, 2021 |
| Priority date | — |
| Expiry date | Jul 22, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05D7/0641
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A flow node includes characterized restrictor in series and adjacent with a valve to provide a primary flow restriction with a minimized volume between the two. A conductance of the characterized restrictor is low enough relative to the valve seat to cause a pressure drop that is sufficiently large relative to the pressure drop across the valve seat that a pressure measurement device is located upstream of the valve is used to determine the pressure to the inlet of the restrictor. A vent can be included to reduce bleed time. Multiple flow nodes in parallel increase a dynamic range.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.