Patent assignee · COMPANY

ICHOR SYSTEMS, INC.

25Patents
25Active
25Granted
54Portfolio score

Filing activity: Sep 15, 2015 → Oct 5, 2023

Most-cited patents

PatentTitleAreaCited byStatus
US10679880B2 Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same Electricity 5 Active
US11158522B2 Fluid delivery system Emerging Cross-Sectional Technologies 4 Active
US10782710B2 Flow control system, method, and apparatus Physics 4 Active
US10663337B2 Apparatus for controlling flow and method of calibrating same Physics 4 Active
US11003198B2 Controlled delivery of process gas using a remote pressure measurement device Physics 3 Active
US11144075B2 Flow control system, method, and apparatus Electricity 3 Active
US10838437B2 Apparatus for splitting flow of process gas and method of operating same Electricity 3 Active
US11899477B2 Fluid flow control system comprising a manifold assembly Electricity 2 Active
US11639865B2 Laminar flow restrictor Emerging Cross-Sectional Technologies 1 Active
US10782165B2 Flow control system, method, and apparatus Physics 1 Active
US11158521B2 Liquid delivery system Emerging Cross-Sectional Technologies 1 Active
US11841036B2 Laminar flow restrictor and seal for same Mechanical Engineering; Lighting; Heating 1 Active
US11585444B2 Seal for a flow restrictor Electricity 1 Active
US12411502B2 Flow control system, method, and apparatus Electricity 0 Active
US11808353B2 Seal insertion tool for a fluid delivery module and method of installing a seal into a fluid delivery module Emerging Cross-Sectional Technologies 0 Active
US11682565B2 Fluid control system Electricity 0 Active
US12222039B2 Guided flow valve assembly and system incorporating same Electricity 0 Active
US11424148B2 Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same Electricity 0 Active
US12062553B2 Method of manufacturing semiconductors using fluid delivery system Emerging Cross-Sectional Technologies 0 Active
US11094563B2 Fluid control system Electricity 0 Active
US12228435B2 Flow control system, method, and apparatus Physics 0 Active
US11990354B2 Method of manufacturing semiconductors using fluid delivery system Emerging Cross-Sectional Technologies 0 Active
US11815920B2 Flow control system, method, and apparatus Electricity 0 Active
US12183597B2 Fluid delivery system Emerging Cross-Sectional Technologies 0 Active
US11698134B2 Seal retainer for a component assembly and method of installing a component into an apparatus for controlling flow Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.