Edge detection system
US11004653B2 · kind B2 · utility
4Cited by
18References
24Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 16, 2019 |
| Grant date | May 11, 2021 |
| Priority date | — |
| Expiry date | Dec 16, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2814
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An edge detection system is provided that generates a scanning electron microscope (SEM) linescan image of a pattern structure including a feature with edges that require detection. The edge detection system includes an inverse linescan model tool that receives measured linescan information for the feature from the SEM. In response, the inverse linescan model tool provides feature geometry information that includes the position of the detected edges of the feature.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.