Metal complexes for depositing films and method of making and using the same
US11008353B2 · kind B2 · utility
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33Claims
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Key dates
| Filing date | Jul 13, 2018 |
| Grant date | May 18, 2021 |
| Priority date | — |
| Expiry date | Jul 13, 2038 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/45553
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
Provided herein are metal-ligand complexes, and associated methods, characterized by formula MLxDy; wherein: M is a metal; x is equal to the oxidation state of M; each D is independently a neutral coordinating ligand; y is zero or an integer selected from the range of 1 to 4; and each L is independently a mono-anionic ligand. L may be a η1,η2-β,β-disubstituted-ω-alkenyl ligand.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.