Inventor · Champaign, IL, US

Gregory S. Girolami

12Patents
4h-index
14Co-inventors
53Inventor score

Filing activity: Oct 31, 2006 → Mar 13, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US7943527B2 Surface preparation for thin film growth by enhanced nucleation Electricity 23 Active
US8362220B2 Metal complex compositions and methods for making metal-containing films Electricity 14 Active
US8110503B2 Surface preparation for thin film growth by enhanced nucleation Electricity 11 Active
US7592254B2 Methods for coating and filling high aspect ratio recessed features Electricity 8 Active
US10103057B2 Use of an inhibitor molecule in chemical vapor deposition to afford deposition of copper on a metal substrate with no deposition on adjacent SIO2 substrate Electricity 4 Active
US10060948B2 Scanning probe and electron microscope probes and their manufacture Electricity 3 Active
US8846146B2 Smoothing agents to enhance nucleation density in thin film chemical vapor deposition Chemistry; Metallurgy 2 Active
US11584986B1 Area selective CVD of metallic films using precursor gases and inhibitors Electricity 2 Active
US11008353B2 Metal complexes for depositing films and method of making and using the same Chemistry; Metallurgy 0 Active
US11253846B2 Metal complexes for depositing films and method of making and using the same Performing Operations; Transporting 0 Active
US11237188B2 Scanning probe and electron microscope probes and their manufacture Electricity 0 Active
US11169177B2 Scanning probe and electron microscope probes and their manufacture Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.