Precursor delivery system and methods related thereto
US11009455B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 2, 2019 |
| Grant date | May 18, 2021 |
| Priority date | — |
| Expiry date | Jul 2, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/3155
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Systems and methods used to deliver a processing gas having a desired diborane concentration to a processing volume of a processing chamber are provided herein. In one embodiment a system includes a borane concentration sensor. The borane concentration sensor includes a body and a plurality of windows. Here, individual ones of the plurality of windows are disposed at opposite ends of the body and the body and the plurality of windows collectively define a cell volume. The borane concentration sensor further includes a radiation source disposed outside of the cell volume proximate to a first window of the plurality of windows, and a radiation detector disposed outside the cell volume proximate to a second window of the plurality of windows.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.