Adaptive control for a power generator

US11009843B2 · kind B2 · utility

Assignee

• MKS Instruments, Inc. · US

Inventors

• David J. Coumou · Webster, US
• Yuriy Elner · Pittsford, US
• Aung Toe · Rochester, US
• Daniel M. Gill · Macedon, US
• Eldridge M. Mount, IV · Macedon, US
• Shaun Smith · Melrose, US

Key dates

• Filing date: Mar 11, 2019
• Grant date: May 18, 2021
• Expiry date: Mar 11, 2039

Classification

• Technology area (CPC —): General

Abstract

A power supply control system includes a power generator for providing a signal to a load. The power generator includes a power controller controlling a power amplifier. The power generator includes an adaptive controller for varying the output signal controlling the power amplifier. The adaptive controller compares an error between a measured output and a predicted output to determine adaptive values applied to the power controller. The power generator also includes a sensor that generates an output signal that is digitized and processed. The sensor signal is mixed with a constant K. The constant K is varied to vary the processing of the sensor output signal. The value K may be commutated based on the phase, frequency, or both phase and frequency, and the bandwidth of K is determined by coupled power in the sensor output signal.