Patent · US Active

MEMS microphone system

US11012789B2 · kind B2 · utility

0Cited by

3References

6Claims

0Family size

Assignees

Akustica, Inc. · US
Robert Bosch GmbH · DE

Inventors

Christoph Hermes · Kirchentellinsfurt, DE
Bernhard Gehl · Wannweil, DE
Arnim Hoechst · Lörrach, DE
Daniel Christoph Meisel · Pittsburgh, US
Andrew J. Doller · Shaler Township, US
Yujie Zhang · Lomita, US
Gokhan Hatipoglu · Pittsburgh, US

Key dates

Filing date	Jun 28, 2018
Grant date	May 18, 2021
Priority date	—
Expiry date	Jun 28, 2038

Classification

Technology area (CPC H)Electricity
CPC primaryH04R2307/025
WIPO fieldAudio-visual technology
WIPO sectorElectrical engineering

Abstract

A MEMS microphone includes a substrate, a lower membrane supported on the substrate, an upper membrane suspended above the lower membrane, a first electrode supported on the lower membrane, and a second electrode supported on the upper membrane. The lower membrane and the upper membrane enclose a cavity in which the first electrode and the second electrode are located. The lower membrane and the upper membrane are each formed of silicon carbonitride (SiCN). The first electrode and the second electrode are each formed of polysilicon.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.