Apparatus and method for generating extreme ultraviolet radiation
US11013097B2 · kind B2 · utility
1Cited by
11References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 27, 2018 |
| Grant date | May 18, 2021 |
| Priority date | — |
| Expiry date | Feb 27, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05G2/0035
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
A target droplet source for an extreme ultraviolet (EUV) source includes a droplet generator configured to generate target droplets of a given material. The droplet generator includes a nozzle configured to supply the target droplets in a space enclosed by a chamber. The target droplet source further includes a sleeve disposed in the chamber distal to the nozzle. The sleeve is configured to provide a path for the target droplets in the chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.