MOCVD system injector for fast growth of AlInGaBN material
US11021789B2 · kind B2 · utility
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26References
14Claims
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Key dates
| Filing date | Jun 22, 2016 |
| Grant date | Jun 1, 2021 |
| Priority date | — |
| Expiry date | Feb 14, 2037 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/458
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A conical supply tube is provided, along with deposition systems using such a tube and methods of its use. The conical supply tube includes a conical head formed from a hollow structure defining a having a fitting end and an opposite, shower end, with the fitting end has an initial diameter that is less than a diameter at the shower end. A MOCVD chamber is also generally provided that includes such a conical supply tube and a susceptor configured to hold a substrate facing the shower end of the conical supply tube. Methods are provided for growing a group III nitride layer on a surface of a substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.