Leveling sensor, load port including the same, and method of leveling a load port
US11022437B2 · kind B2 · utility
1Cited by
9References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 13, 2020 |
| Grant date | Jun 1, 2021 |
| Priority date | — |
| Expiry date | Jan 13, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C2009/066
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A leveling sensor, a load port including a leveling sensor, and a method of leveling a load port using a load port are disclosed. In an embodiment, a sensor includes an accelerometer configured to detect leveling and vibration of a load port and produce a plurality of data; a plurality of indicator lights configured to display a level measurement and a level direction based on the leveling of the load port; a processor configured to process the data produced by the accelerometer; and a wired connection configured to connect the processor to an external device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.