Inventor · Waltham, MA, US

Yi-Lin Wang

7Patents
1h-index
11Co-inventors
44Inventor score

Filing activity: Jan 16, 2014 → Aug 10, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US10533852B1 Leveling sensor, load port including the same, and method of leveling a load port Physics 1 Active
US11827970B2 Shutter disc for a semiconductor processing tool Electricity 1 Active
US11022437B2 Leveling sensor, load port including the same, and method of leveling a load port Physics 1 Active
US12297184B2 Niraparib salts Chemistry; Metallurgy 0 Active
US12215414B2 Shutter disc for a semiconductor processing tool Electricity 0 Active
US12112930B2 Method for improving deposition process Electricity 0 Active
US9326270B2 Data transmission method through point to multi-point transmission service Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.