Method for temperature control of a component
US11022903B2 · kind B2 · utility
1Cited by
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20Claims
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Key dates
| Filing date | Apr 6, 2020 |
| Grant date | Jun 1, 2021 |
| Priority date | — |
| Expiry date | Apr 6, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67248
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for temperature control of a component that is transferable between a first system and a second system includes: ascertaining a temperature drift of a temperature of the component that is to be expected after transfer of the component from the first system into the second system; and modifying a temperature prevailing in the first system and/or a temperature prevailing in the second system such that the temperature drift that is actually occurring after transfer of the component from the first system into the second system is reduced with respect to the expected temperature drift.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.