Method and device for optical surface measurement by means of a chromatic confocal sensor
US11029143B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 12, 2017 |
| Grant date | Jun 8, 2021 |
| Priority date | — |
| Expiry date | Jul 12, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2210/50
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to a method and a device for the optical measurement of technical surfaces by means of a chromatic confocal sensor, wherein light from a light source (2) is directed to the surface (5) of a sample to be measured via an optical system (4, 14) with defined chromatic aberration. According to the invention, the light source (2) can be tuned in relation to the wavelength to be emitted. The light reflected back from the sample surface (5) is directed to at least one photosensor (7), wherein the sensor signal is measured over time by means of a detection system (8) and the time of a signal maximum is determined. The detection system (8) derives the height Z of the surface (5) from the wavelength of the light source (2) at the time of the signal maximum.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.