Enhanced shutter efficiency time-of-flight pixel
US11032496B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 22, 2019 |
| Grant date | Jun 8, 2021 |
| Priority date | — |
| Expiry date | Dec 9, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F39/811
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A time-of-flight pixel array comprises multiple pixel cells. The pixel cell comprises a light collection region, a light shielded region, and a deep trench isolation (DTI) structure that encircles the light collection region to prevent light from entering the light shielded region. Photogate in the light collection region is disposed above a photodiode to accumulate the photo-generated electrical charges. A doped region disposed near the photogate collects the attracted charges. The doped region extends to the light shielded region and transfers the collected charges to a floating diffusion through a shutter transistor also in the light shielded region. DTI or similar structures are deployed to the entire pixel array to prevent light from exchanging between different light collection regions and light from entering the light shielded regions of all pixel cells. Interference between the shielded regions of different pixel cells is also minimized.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.