Closed-loop control of a scanner with frequency-space analysis of a system deviation

US11036038B2 · kind B2 · utility

Assignee

• Carl Zeiss Microscopy GmbH · DE

Inventors

• Frank Klemm · Jena, DE
• Joerg Engel · Triebes, DE
• Carsten Wehe · Weimar, DE

Key dates

• Filing date: Apr 16, 2019
• Grant date: Jun 15, 2021
• Expiry date: Dec 30, 2039

Classification

• Technology area (CPC G): Physics
• CPC primary: G05B13/00
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

The invention is based on the object of providing a particularly reliable closed-loop control for a scanner. According to various examples, this object is achieved by an analysis of a system deviation in the frequency space. By way of example, an input signal, which is indicative of a time dependence of the system deviation between an ACTUAL pose and a TARGET pose of a deflection unit of the scanner, can be expanded into a multiplicity of error components and a plurality of frequencies. Then, a corresponding correction signal component can be determined for each of the multiplicity of error components. By way of example, such techniques can be used in a laser scanning microscope.