Patent · US Active

Movable and removable process kit

US11043400B2 · kind B2 · utility

1Cited by

50References

17Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Andreas Schmid · Duisburg, DE
Denis M. Koosau · Sunnyvale, US

Key dates

Filing date	Dec 17, 2018
Grant date	Jun 22, 2021
Priority date	—
Expiry date	Jan 28, 2039

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/32642
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

Aspects of the present disclosure generally relate to methods and apparatuses for adjusting an edge ring position, and for removing or replacing one or more components of a process kit of a process chamber. The process kit includes one or more of an edge ring, a support ring, a sliding ring, and other consumable or degradable components.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.