Probe systems and methods
US11047879B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 11, 2019 |
| Grant date | Jun 29, 2021 |
| Priority date | — |
| Expiry date | Jan 8, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/07392
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Probe systems and methods are disclosed herein. The methods include directly measuring a distance between a first manipulated assembly and a second manipulated assembly, contacting first and second probes with first and second contact locations, providing a test signal to an electrical structure, and receiving a resultant signal from the electrical structure. The methods further include characterizing at least one of a probe system and the electrical structure based upon the distance. In one embodiment, the probe systems include a measurement device configured to directly measure a distance between a first manipulated assembly and a second manipulated assembly. In another embodiment, the probe systems include a probe head assembly including a platen, a manipulator operatively attached to the platen, a vector network analyzer (VNA) extender operatively attached to the manipulator, and a probe operatively attached to the VNA extender.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.