Foreign substance detection device, foreign substance detection method and recording medium
US11048016B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 16, 2018 |
| Grant date | Jun 29, 2021 |
| Priority date | — |
| Expiry date | Jan 16, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2015/0687
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus includes flow path units 15A to 15K configured to form flow paths 17A to 17K through which a fluid supplied to a target object W is flown; a laser light irradiator 51 configured to irradiate a laser light into the flow path units such that an optical path intersects with a flow direction of the fluid in the flow path units; light receiving elements 45A and 45B provided at the optical path having passed through the flow path units; a detector 6 configured to detect the foreign substance in the fluid based on a signal from the light receiving elements; and a filter unit 57 provided at the optical path between the light receiving elements and the flow path units, and configured to block a Raman scattered light and allow a Rayleigh scattered light to be transmitted to the light receiving elements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.