Optical module with an anticollision device for module components

US11054755B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Joachim Hartjes · Aalen, DE
• Alexander Wolf · Oberkochen, DE
• Toralf Gruner · Hennef (Sieg), DE

Key dates

• Filing date: Feb 7, 2019
• Grant date: Jul 6, 2021
• Expiry date: Jan 3, 2040

Classification

• Technology area (CPC G): Physics
• CPC primary: G21K1/06
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

The disclosure relates to an optical module with first and second components, a supporting structure and an anticollision device. The first component is supported by the supporting structure and is arranged adjacent to and at a distance from the second component to form a gap. The supporting structure defines a path of relative movement, on which the first and second components move in relation to one another under the influence of a disturbance, a collision between collision regions of the first and second components occurring if the anticollision device is inactive. The anticollision device includes a first anticollision unit on the first component, which produces a first field, and a second anticollision unit on the second component, which is assigned to the first anticollision unit and produces a second field.