Sample transport device with integrated metrology
US11056366B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 20, 2019 |
| Grant date | Jul 6, 2021 |
| Priority date | — |
| Expiry date | Feb 20, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/213
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A metrology system may include one or more casings that fit within an interior cavity of a sample transport device, an illumination source within one of the one or more casings, one or more illumination optics within one of the one or more casings for directing illumination from the illumination source to a sample located in the interior cavity of the sample transport device, one or more collection optics within one of the one or more casings for light from the sample in response to the illumination from the illumination source, and one or more detectors within one of the one or more casings for generating metrology data based on at least a portion of the light collected by the one or more collection optics.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.