Inventor · Santa Clara, CA, US

Shankar Krishnan

109Patents
12h-index
134Co-inventors
89Inventor score

Filing activity: Oct 17, 1989 → Apr 1, 2024

Most-cited inventions

PatentTitleAreaCited byStatus
US6052187A Hyperspectral polarization profiler for remote sensing Physics 45 Expired
US5011295A Method and apparatus to simultaneously measure emissivities and thermodynamic temperatures of remote objects Physics 35 Expired
US7755764B2 Purge gas flow control for high-precision film measurements using ellipsometry and reflectometry Physics 31 Active
US8860937B1 Metrology systems and methods for high aspect ratio and large lateral dimension structures Electricity 24 Active
US7907264B1 Measurement of thin film porosity Physics 23 Active
US8040511B1 Azimuth angle measurement Physics 23 Active
US9516792B2 Ultrasound assisted immersion cooling Electricity 21 Active
US9228943B2 Dynamically adjustable semiconductor metrology system Physics 20 Active
US9433132B2 Recirculating dielectric fluid cooling Electricity 19 Active
US9470639B1 Optical metrology with reduced sensitivity to grating anomalies Physics 17 Active
US9310290B2 Multiple angles of incidence semiconductor metrology systems and methods Physics 17 Active
US6812925B1 Map simplification system Physics 15 Expired
US7408641B1 Measurement systems configured to perform measurements of a specimen and illumination subsystems configured to provide illumination for a measurement system Physics 12 Expired
US7274440B1 Systems and methods for measuring stress in a specimen Electricity 11 Expired
US9404872B1 Selectably configurable multiple mode spectroscopic ellipsometry Physics 10 Active
US7831090B1 Global registration of multiple 3D point sets via optimization on a manifold Physics 10 Active
US9816810B2 Measurement of multiple patterning parameters Physics 9 Active
US7006222B2 Concurrent measurement and cleaning of thin films on silicon-on-insulator (SOI) Physics 9 Expired
US9490182B2 Measurement of multiple patterning parameters Physics 8 Active
US10438825B2 Spectral reflectometry for in-situ process monitoring and control Electricity 6 Active
US7825324B2 Spreading thermoelectric coolers Electricity 6 Active
US8571309B2 System and method of image upsampling Physics 5 Active
US9116103B2 Multiple angles of incidence semiconductor metrology systems and methods Physics 5 Active
US10041873B2 Porosity measurement of semiconductor structures Physics 5 Active
US7869040B1 Measurement systems configured to perform measurements of a specimen and illumination subsystems configured to provide illumination for a measurement system Physics 5 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.