Method for fabricating superconducting devices using a focused ion beam

US11063201B2 · kind B2 · utility

Assignee

• The Regents of the University of California · US

Inventors

• Shane A. Cybart · Corona, US
• Ethan Y. Cho · San Diego, US
• Robert C. Dynes · Village of La Jolla, US
• Travis Joseph Wong · Village of La Jolla, US

Key dates

• Filing date: Jan 23, 2019
• Grant date: Jul 13, 2021
• Expiry date: May 17, 2039

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10N69/00

Abstract

Nano-scale junctions, wires, and junction arrays are created by using a focused high-energy ion beam to direct-write insulating or poorly conducting barriers into thin films of materials that are sensitive to disorder, including superconductors, ferromagnetic materials and semiconductors.