Trench-based optical components for photonics chips
US11067751B2 · kind B2 · utility
4Cited by
8References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 9, 2019 |
| Grant date | Jul 20, 2021 |
| Priority date | — |
| Expiry date | Oct 9, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12061
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Structures including a waveguide core and methods of fabricating a structure that includes a waveguide core. A dielectric layer including a trench with a first sidewall and a second sidewall, and a waveguide core positioned inside the trench between the first and second sidewalls of the trench. The waveguide core has a first width, and the trench has a second width between the first and second sidewalls that is greater than the first width.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.