Apparatus for manufacturing pellicle
US11067887B2 · kind B2 · utility
0Cited by
6References
14Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Jul 1, 2020 |
| Grant date | Jul 20, 2021 |
| Priority date | — |
| Expiry date | Jul 1, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F1/64
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of manufacturing a pellicle includes preparing a pellicle frame having an adhesive layer coated thereon, treating a pellicle membrane with vapor under vapor atmosphere, attaching the pellicle membrane onto the pellicle frame, and drying the pellicle membrane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.