Substrate tilt control in high speed rotary sorter

US11072502B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Asaf Schlezinger · Sunnyvale, US
• Markus J. Stopper · Hergolding, DE

Key dates

• Filing date: Mar 19, 2019
• Grant date: Jul 27, 2021
• Expiry date: Oct 16, 2039

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/6838
• WIPO field: Handling
• WIPO sector: Mechanical engineering

Abstract

An apparatus and method for sorting a plurality of substrates is disclosed. The apparatus includes a sorting unit capable of supporting a plurality of bins, a rotatable support disposed within the sorting unit, the rotatable support rotatable about a rotational axis, a plurality of grippers coupled to the rotatable support on a common radius relative to the rotational axis, the grippers positioned to travel along a path above the bins as the rotatable support rotates, and an air nozzle configured to reorient a sorted substrate relative to a stacked substrate in a bin of the plurality of bins when released by one of the grippers into the bin.