Scanning electron microscope objective lens system and method for specimen observation
US11075056B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 2, 2018 |
| Grant date | Jul 27, 2021 |
| Priority date | — |
| Expiry date | Dec 22, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2806
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A scanning electron microscope objective lens system is disclosed, which includes: a magnetic lens, a deflection device, a deflection control electrode, specimen to be observed, and a detection device; in which, The opening of the pole piece of the magnetic lens faces to the specimen; the deflection device is located in the magnetic lens, which includes at least one sub-deflector; the deflection control electrode is located between the detection device and the specimen, and the deflection control electrode is used to change the direction of the primary electron beam and the signal electrons generating from the specimen; the detection device comprises the first sub-detector for detecting the back-scattered electrons and the second sub-detector for detecting the second electrons. A specimen detection method is also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.