Semiconductor micro probe array having compliance
US11079406B2 · kind B2 · utility
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13References
15Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 31, 2016 |
| Grant date | Aug 3, 2021 |
| Priority date | — |
| Expiry date | Apr 23, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2889
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A die probe including a probe tip operably connected to a first surface of a thin film; a metal trace, wherein a first portion of the metal trace is operably connected to a second surface of the thin film, the second surface of the thin film opposite the first surface of the thin film; and an upper space transformer, wherein a second portion of the metal trace is operably connected to the upper space transformer, wherein a pressurized liquid and/or gas is configured to expand a space between the second surface of the thin film and the upper space transformer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.