Chamber valve
US11092245B2 · kind B2 · utility
0Cited by
25References
14Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 22, 2016 |
| Grant date | Aug 17, 2021 |
| Priority date | — |
| Expiry date | Jan 8, 2037 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16K51/02
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A chamber valve (100) for use in processes requiring vacuum pressures has a compact design which minimizes the space needed for the valve in the travel direction. The chamber valve gate (116) is moveable between a first position in which the gate is offset from the portal (110), and a second position in which the gate is aligned with the portal. The gate will move into alignment with the portal while remaining within a plane parallel or nearly parallel to the portal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.