Patent assignee · US · COMPANY

GENERAL PLASMA INC.

12Patents
12Active
12Granted
47Portfolio score

Filing activity: Sep 13, 2004 → Jun 13, 2016 · 5 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US7932678B2 Magnetic mirror plasma source and method using same Electricity 40 Active
US7993496B2 Cylindrical target with oscillating magnet for magnetron sputtering Electricity 4 Active
US9136086B2 Closed drift magnetic field ion source apparatus containing self-cleaning anode and a process for substrate modification therewith Electricity 3 Active
US10989343B2 Push-to-connect and pull-to-disconnect quick coupling Mechanical Engineering; Lighting; Heating 2 Active
US8304744B2 Closed drift ion source Electricity 2 Active
US10134557B2 Linear anode layer slit ion source Electricity 2 Active
US8535490B2 Rotatable magnetron sputtering with axially movable target electrode tube Electricity 2 Active
US9388490B2 Rotary magnetron magnet bar and apparatus containing the same for high target utilization Electricity 1 Active
US11092245B2 Chamber valve Mechanical Engineering; Lighting; Heating 0 Active
US9103018B2 Sputtering target temperature control utilizing layers having predetermined emissivity coefficients Electricity 0 Active
US10811236B2 Magnetic anode for sputter magnetron cathode Electricity 0 Active
US10273570B2 Rotary magnetron magnet bar and apparatus containing the same for high target utilization Electricity 0 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.