Method for generating a result image
US11092557B2 · kind B2 · utility
0Cited by
1References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 24, 2020 |
| Grant date | Aug 17, 2021 |
| Priority date | — |
| Expiry date | Mar 24, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2806
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of generating a result image of an object using a particle beam system includes recording multiple primary images of a region of the object using the particle beam system. Recording of each of the primary images includes scanning the primary particle beam along a scan direction across the region and detecting secondary particles generated thereby. The scan directions used for recording at least one pair of two of the primary images differ at least by a first threshold value of at least 10°. The method also includes generating, based on the multiple primary images, the result image representing the region of the object.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.