Resist filtering system having multi filters and apparatus having the resist filtering system
US11097211B2 · kind B2 · utility
0Cited by
8References
17Claims
0Family size
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Key dates
| Filing date | Sep 11, 2019 |
| Grant date | Aug 24, 2021 |
| Priority date | — |
| Expiry date | Sep 11, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67023
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A resist coating apparatus including a resist supplying system; a resist filtering system having a first filter, a second filter, and a pump between the first filter and the second filter; and a resist dispensing system, wherein the first filter includes a plurality of first unit filters connected in parallel.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.