Inventor · Yongin-si, KR

Kwangsub Yoon

9Patents
2h-index
24Co-inventors
43Inventor score

Filing activity: Aug 5, 2014 → Oct 3, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US9780033B2 Semiconductor device and method of manufacturing the same Electricity 7 Active
US10096546B2 Semiconductor device Electricity 3 Active
US10211156B2 Semiconductor device Electricity 2 Active
US11097211B2 Resist filtering system having multi filters and apparatus having the resist filtering system Electricity 0 Active
US9461003B1 Semiconductor devices having shielding pattern Electricity 0 Active
US12112948B2 Method of manufacturing integrated circuit device using a metal-containing photoresist composition Electricity 0 Active
US12189295B2 Spin coater and semiconductor fabrication method using the same Performing Operations; Transporting 0 Active
US9443732B1 Method of fabricating semiconductor device Electricity 0 Active
US11537047B2 Spin coater and semiconductor fabrication method for reducing regeneration of photoresist Performing Operations; Transporting 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.