Prestrained vibrating accelerometer
US11099205B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | May 9, 2017 |
| Grant date | Aug 24, 2021 |
| Priority date | — |
| Expiry date | Mar 27, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/0907
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device for measuring an acceleration includes a vibrating accelerometer including: a semiconductor substrate forming a fixed frame of the accelerometer; a test weight of the same material as the substrate and connected to the fixed frame, movable translationally along at least one sensing axis of the vibrating accelerometer; a guide of the same material as the substrate, connected to the fixed frame and test weight, guiding the test weight in the direction of the sensing axis; a layer made of a piezoelectric semiconductor deposited on the substrate, the layer being tensilely prestrained; a resonator in the layer connected to the fixed frame, the resonator subjected to tension or compression in the direction of the sensing axis; and at least one transducer connected to the resonator, able to actuate the resonator, to keep the resonator oscillating and/or to detect an electrical signal generated by the resonator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.