Patent · US Active

Methods for manufacturing a memory array having strings of memory cells comprising forming bridge material between memory blocks

US11101210B2 · kind B2 · utility

2Cited by
9References
9Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 25, 2019
Grant dateAug 24, 2021
Priority date
Expiry dateJan 28, 2040

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10B43/35
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A memory array comprising strings of memory cells comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers. Operative channel-material strings of memory cells extend through the insulative tiers and the conductive tiers. Intervening material is laterally-between and longitudinally-along immediately-laterally-adjacent of the memory blocks. The intervening material comprises longitudinally-alternating first and second regions that individually have a vertically-elongated seam therein. The vertically-elongated seam in the first regions has a higher top than in the second regions. The seam tops in the second regions are elevationally-coincident with or below a bottom of an uppermost of the conductive tiers. Methods are disclosed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.