Patent assignee · US · COMPANY

Micron Technology, Inc.

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37,772Patents
21,281Active
37,772Granted
58Portfolio score

Filing activity: Mar 20, 1978 → Jul 15, 2024 · 4,483 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US5278100A Chemical vapor deposition technique for depositing titanium silicide on semiconductor wafers Emerging Cross-Sectional Technologies 1,096 Expired
US5328810A Method for reducing, by a factor or 2.sup.-N, the minimum masking pitch of a photolithographic process Emerging Cross-Sectional Technologies 1,035 Expired
US7611980B2 Single spacer process for multiplying pitch by a factor greater than two and related intermediate IC structures Emerging Cross-Sectional Technologies 718 Active
US6235554A Method for fabricating stackable chip scale semiconductor package Electricity 674 Expired
US7045430B2 Atomic layer-deposited LaAlO3 films for gate dielectrics Electricity 670 Expired
US5920788A Chalcogenide memory cell with a plurality of chalcogenide electrodes Emerging Cross-Sectional Technologies 669 Expired
US7135421B2 Atomic layer-deposited hafnium aluminum oxide Electricity 632 Expired
US7235501B2 Lanthanum hafnium oxide dielectrics Electricity 628 Expired
US7192824B2 Lanthanide oxide / hafnium oxide dielectric layers Electricity 605 Expired
US5751012A Polysilicon pillar diode for use in a non-volatile memory cell Electricity 602 Expired
US7192892B2 Atomic layer deposited dielectric layers Electricity 598 Expired
US7312494B2 Lanthanide oxide / hafnium oxide dielectric layers Electricity 579 Expired
US7041609B2 Systems and methods for forming metal oxides using alcohols Electricity 576 Expired
US7405454B2 Electronic apparatus with deposited dielectric layers Electricity 564 Expired
US7393736B2 Atomic layer deposition of Zrx Hfy Sn1-x-y O2 films as high k gate dielectrics Electricity 558 Expired
US7732343B2 Simplified pitch doubling process flow Electricity 545 Active
US7910288B2 Mask material conversion Electricity 531 Active
US6784108B1 Gas pulsing for etch profile control Electricity 528 Expired
US5739585A Single piece package for semiconductor die Emerging Cross-Sectional Technologies 523 Expired
US6410459B1 Wafer planarization using a uniform layer of material and method and apparatus for forming uniform layer of material used in semiconductor processing Emerging Cross-Sectional Technologies 522 Expired
US5801104A Uniform dielectric film deposition on textured surfaces Emerging Cross-Sectional Technologies 520 Expired
US7431966B2 Atomic layer deposition method of depositing an oxide on a substrate Chemistry; Metallurgy 517 Expired
US7589029B2 Atomic layer deposition and conversion Electricity 515 Expired
US7838084B2 Atomic layer deposition method of depositing an oxide on a substrate Chemistry; Metallurgy 511 Active
US6218288A Multiple step methods for forming conformal layers Electricity 510 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.