Apparatus, method and computer program product for defect detection in work pieces
US11105839B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 2, 2020 |
| Grant date | Aug 31, 2021 |
| Priority date | — |
| Expiry date | Nov 2, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/28
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.