Probe card with angled probe and wafer testing method using the same
US11105848B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 31, 2020 |
| Grant date | Aug 31, 2021 |
| Priority date | — |
| Expiry date | May 31, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/34
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probe card includes a circuit board having a through opening therein. A fixing member is at least partially in the through opening of the circuit board and has a through opening therein. The through opening of the fixing member is defined at least partially by opposite first and second sidewalls of the fixing member. A plurality of probes each includes an arm portion and a tip portion. One end of the arm portion is connected to the circuit board. The arm portion extends through the first sidewall of the fixing member into the through opening of the fixing member. The arm portion is angled with respect to a direction perpendicular to the first sidewall of the fixing member when viewed from above. The tip portion extends from the arm portion. The second sidewall of the fixing member is free of probes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.