Pulsed CFE electron source with fast blanker for ultrafast TEM applications
US11114272B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Sep 25, 2019 |
| Grant date | Sep 7, 2021 |
| Priority date | — |
| Expiry date | Oct 7, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/06341
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Charged particle beams (CPBs) are modulated using a beam blanker/deflector and an electrically pulsed extraction electrode in conjunction with a field emitter and a gun lens. With such modulation, CPBs can provide both pulsed and continuous mode operation as required for a particular application, while average CPB current is maintained within predetermined levels, such as levels that promote X-ray safe operation. Either the extraction electrode or the beam blanker/deflector can define CPB pulse width, CPB on/off ratio, or both.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.