Heat treatment apparatus and heat treatment method
US11114319B2 · kind B2 · utility
4Cited by
0References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 21, 2019 |
| Grant date | Sep 7, 2021 |
| Priority date | — |
| Expiry date | Mar 11, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/30
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A heat treatment apparatus includes a heating unit provided around a processing container accommodating a substrate; a plurality of blowing units configured to blow a cooling medium into a space between the processing container and the heating unit; and a shutter configured to simultaneously opens/closes at least two of the plurality of blowing units and including a slit formed corresponding to each of the blowing units.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.