Patent · US Active

Immersion matrix, its use and immersion device

US11119301B2 · kind B2 · utility

0Cited by

4References

21Claims

0Family size

Assignee

Carl Zeiss Microscopy GmbH · DE

Inventors

Thomas Ohrt · Golmsdorf, DE
Thomas Kalkbrenner · Jena, DE

Key dates

Filing date	Sep 27, 2018
Grant date	Sep 14, 2021
Priority date	—
Expiry date	Jan 21, 2040

Classification

Technology area (CPC G)Physics
CPC primaryG02B27/0068
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The invention relates to an immersion matrix (5), designed for adjusting optical properties at interfaces of optical arrangements, having a porosity with pores of at least one pore size selected from a range from >20 nm to 200 μm and/or nanopores in the material of the immersion matrix (5), wherein the nanopores have at least one average pore size selected from a range of 0.5 nm to 20 nm, and an elasticity modulus E selected from a range of 0.1-100 MPa. The invention furthermore relates to the use of the immersion matrix (5), an arrangement with the immersion matrix and an immersion device.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.