Active x-ray attack prevention device

US11121097B1 · kind B1 · utility

Assignee

• GLOBALFOUNDRIES U.S. Inc. · US

Inventors

• Vibhor Jain · Williston, US
• Sebastian T. Ventrone · South Burlington, US
• Siva P. Adusumilli · South Burlington, US
• John J. Ellis-Monaghan · Grand Isle, US
• Ajay Raman · South Burlington, US

Key dates

• Filing date: May 22, 2020
• Grant date: Sep 14, 2021
• Expiry date: May 22, 2040

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L2221/6834
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

The present disclosure relates to a metal layer for an active x-ray attack prevention device for securing integrated circuits. In particular, the present disclosure relates to a structure including a semiconductor material, one or more devices on a front side of the semiconductor material, a backside patterned metal layer under the one or more devices, located and structured to protect the one or more devices from an active intrusion, and at least one contact providing an electrical connection through the semiconductor material to a front side of the backside patterned metal layer. The backside patterned metal layer is between a wafer and one of the semiconductor material and an insulator layer.