Device for measuring surface characteristics of a material
US11125805B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 22, 2019 |
| Grant date | Sep 21, 2021 |
| Priority date | — |
| Expiry date | Jan 19, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/002
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device is provided for electrically measuring surface characteristics of a sample. The device comprises at least one group of three electrodes: a first and second electrode spaced apart from each other and configured to be placed onto the surface of the sample, and a third electrode between the first two but isolated from these two electrodes by a one or more first insulators, wherein a second insulator further isolates the central electrode from the sample when the device is placed thereon. The three electrodes and the insulators are attached to a single or to multiple holders with conductors incorporated therein for allowing the coupling of the electrodes to power sources or measurement tools. The placement of the device onto a semiconductor sample creates a transistor with the sample surface acting as the channel. The device thereby allows the determination of the transistor characteristics of the sample in a straightforward way.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.